Xingqun Jiang | xj22@cornell.edu
Keck SEM (LEO)
Interesting nano-scaled patterns can be achieved not only by lithography, also by other alternatives such as chemistry. Figure shows a densely packed nanopores (dark region) that were formed during aluminum electrolysis, with a diameter of 50 nm. The perfect 90° corner was defined by KOH anisotropic etch of Silicon.
Electrical and Computer Engineering
Michael G. Spencer | spencer@ece.cornell.edu