ADE Phase Shift MicroXAM Optical interferometric profiler

Location: Bard Hall B56

 

Philip Carubia
607-255-3371

pmc228@cornell.edu
B-57 Bard Hall

Non-Contact Surface Profiler
ADE Phase Shift
MicroXAM

Training required to use this instrument:
General Lab Safety Training (EHS 2555)

Non-contact 3D surface profiler Measures roughness, finish and texture of surfaces ranging from highly polished surfaces in optics, wafers and disk media to rough surfaces such as rolled steel and aluminum, paper, plastics, and ceramics. Characterize 3D microstructure such as micro-electronic mechanical systems (MEMs).

MicroXAM specs.pdf