Cornell Center for Materials Research

Tencor Alpha step 500

D12 Clark Hall

 

Jonathan Shu
Office (607) 255-9833
Cell (607) 227-8154
jbs24@cornell.edu
BD-22 Clark Hall

Stylus Surface Profiler
Tencor
Alpha Step 500

The Tencor Profiler is a metrology tool that generates a 2 dimensional profile of the surface of a sample. This is done by a stylus, which touches the surface of a sample and runs across a prescribed length.

Accuracies for the three different profile ranges are: 13 um range = +/- 25 A 300 um range = +/- 50 A 2 mm range = +/- 200 A

http://www.brumleysouth.com/as500.php
 
Edited on: 26 May 2009 5:38 pm