Cornell Center for Materials Research

Electron Beam Evaporator

Clark D21

 

 

Jonathan Shu
Office (607) 255-9833
Cell (607) 227-8154
jbs24@cornell.edu
BD-22 Clark Hall

T-2 Dual Beam Evaporator

24" dia. steel chamber, cryo-pumped, two 8kw four hearth each, electron beam guns, 14kw power supply, two Inficon XTC thickness monitors, hot and cold stage, and other multi-purpose stages.

 
Edited on: 26 May 2009 5:38 pm