Peter Ercius

TEM: FEI(Tecnai)-Duffield

The foreground shows a 3D view of a Ta barrier layer with projected intensity in red (behind). The blue overlay (behind) represents a single cross-section of the Cu line within the Ta barrier (not shown). The overlap indicates where surface roughness blurs out the Cu cross-sectional area if measured by projection.

Applied and Engineering Physics

Advisor        David Muller