Ferdinand Kuemmeth

FE-SEM: Zeiss(1550)-Clark

Metallic bilayers (here 5/30nm W/Pt) are often stressed after deposition. In this sample an insufficient descum of the patterned substrate before metal deposition resulted in the peeling off of a 9x9um electrode during SEM imaging. The imprint of the scum on the metal film is clearly visible in panel d.

Physics Department

Advisor         Dan Ralph