HomeAboutNewsTescan Mira SEM now with small probe elemental analysis capability! (May 2014)

Tescan Mira SEM now with small probe elemental analysis capability! (May 2014)

Bruker-EDS_Mira-1

The Tescan Mira in Bard Hall now has a Bruker Energy Dispersive Spectrometer (EDS) for small probe elemental analysis. Spatial resolution of EDS is ~1 micron with 1000 ppm sensitivity to elements Boron and heavier (Z>=5). The energy resolution is 126 eV at Mn. The Bruker software can perform Point, MultiPoint, Line, Mapping, and HyperMapping analyses. In HyperMapping, a spectrum is taken at every pixel allowing a user to perform post-acquisition processing. Multipoint analysis allows a user to ‘draw’ arbitrary regions for EDS analysis.
Identical Bruker software has been installed for the existing EDS on the Keck SEM in Clark Hall, making both CCMR SEMs nearly identical in capabilities. Please contact Don Werder (djw326@cornell.edu) regarding the Bard Hall SEM, and Mick Thomas (mt57@cornell.edu) regarding the Clark Hall SEM.

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