MS&E 522

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Cornell University
Department of Materials Science & Engineering


Mechanical Properties of Thin Films

Professor: Shefford P. Baker, 129 Bard Hall, 255-6679, spb14@cornell.edu

Announcements:

  • 23 May 00 - Final exams have been graded. See "exams" page for results.

  • 8 May 00 - The final exam will be a take-home exam. Please pick up your exam on Friday, May 12 at noon. It is due on Monday, May 15, at 5:00 pm. See "Exams" page for details.

  • 16 Apr 00 - MODIFICATIONS TO MODIFICATIONS TO CLASS MEETING SCHEDULE: The lectures on April 25, and 27. WILL TAKE PLACE after all. The April 18 makeup is cancelled.

  • 2 Mar 0 - The midterm will be held on March 30. See "Exams" page for details.

  • 24 Feb 00 - MODIFICATIONS TO CLASS MEETING SCHEDULE: There will be NO LECTURE on March 7, April 25, and 27. MAKEUP LECTURES will be held on Feb 29, April 4 and April 18. Makeups will be at 7:30 (pm) in Bard 140. The makeups will be videotaped for those who have schedule conflicts.

  • 24 Feb 00 - The due date for problem set #2 has been changed. Please bring your assignments by Prof. Baker's office before 5:00pm on Friday, March 3.

  • 2 Feb 00 - Welcome to the MS&E 522 website. At this website, students in MS&E 522 will find information about the organization of the class, problem sets and solutions.

Overview:

Materials in the form of thin films (typical thicknesses of 1 mm or less) are of importance in a wide variety of technologies ranging from microelectronics to cutting tool coatings. Although thin films are frequently used for other (optical, electronic, magnetic) properties, the mechanical properties are often found to be the limiting feature in applications as a result of the fact that thin films typically support very high stresses during service. These stresses can lead to distortion of the device containing the film, deformation, fracture or decohesion of the film, or degradation of the film due to enhanced diffusion or corrosion. Furthermore, thin films typically exhibit mechanical properties which are quite different from those of the same materials in bulk form. These differences arise both from the unique non-equilibrium microstructural features of materials in thin film form as well as from the dimensional constraints imposed by the film thickness. In order to understand, predict, and improve the performance of thin films and thin film composites, it is necessary to understand their mechanical properties. This lecture series will include a brief overview of the origins of stresses in thin films and of their response to these stresses; including elastic and plastic deformation and fracture and decohesion processes. Methods for measuring stresses and mechanical properties in thin films will be discussed.


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