Thermo Scientific Helios G4-UX FIB
The Helios G4-UX incorporates the latest electron and ion column technologies to create a very versatile and capable FIB. The sample stage is a 150 x 150 mm eucentric piezo stage with an in-chamber Nav-Cam for accurate positioning of samples. The EasyLift EX NanoManipulator, in combination with the AutoTEM4 automated software, enables automated sample production of TEM lamella, significantly reducing the time required to produce specimens.
Specifications
- High resolution secondary and backscattered imaging even at low voltages
- High resolution ion beam imaging, down to 2keV
- Low-voltage milling capability produces high quality TEM lamella
- Energy-dispersive X-ray (EDX) detector for elemental analysis and X-ray mapping
- Deposition sources (platinum and carbon)
- High-stability EasyLift EX Nano Manipulator for TEM sample prep, sample modification, and localized grounding for work on insulating materials
- Auto TEM software to reduce the time needed to make TEM Lamella
The lamella shown above was thinned with the Helios. Final thinning at low voltage reduces surface damage. Note that there is a gradient to the thin film from too thin (left hand side) to too thick (right hand side). Somewhere in the middle is an area of optimal thickness for high resolution imaging and EELS analysis.
To acknowledge: This work made use of a Helios FIB supported by NSF (DMR-1539918) and the Cornell Center for Materials Research Shared Facilities.