Tescan Mira3 FESEM Details

Primary Staff: Kevin Silverstein, Mark Pfeifer; Secondary Staff: Phil Carubia
Location: Bard Hall B47B 

Imaging at very high resolution (1 nm at 30 keV and 2 nm at 1 keV) is possible with certain types of specimens. Its superb performance, particularly at low accelerating voltages (i.e., 0.2 to 1 kV using Beam Deceleration Mode), makes it especially suitable for imaging the surface detail of polymeric, biological, and other low-density materials. Imaging detectors include a standard secondary electron detector for large working distances, as well as a motorized low-energy backscatter electron detector, in-lens (In-Beam Mode) secondary and backscatter electron detectors at short working distances. The Mira SEM is also equipped with a Bruker XFlash EDS detector for elemental analysis.