Keyence VK-X260 Details

Clark Hall D15 (Primary Staff: Alicia Tripp; Secondary Staff: Steve Kriske) 

The Keyence is a confocal laser profilometer that utilizes in-focus reflections from a 408 nm laser source to obtain 3D images of material surfaces. This microscope performs non-contact imaging with a fully motorized precision stage, achieving resolution down to 5 nm vertically and 130 nm laterally. In addition to basic topological measurements, transparent film thickness measurements are possible.

Seamless imaging over large areas is achieved through the precision stage and stitching software. Obtained images can be processed and analyzed through user-friendly software, turned into CAD drawings, and compared with similar images to measure differences between samples. Additionally, we have a vertical height extender on the scan head, allowing samples up to 5 inches thick to be profiled. 

Installed objectives and their associated resolution parameters: