Keyence VK-X3000 Details

Clark Hall D15 (Primary Staff: Alicia Tripp; Secondary Staff: Steve Kriske) 

The Keyence is a confocal laser profilometer with a white light interferometry module that utilizes in-focus reflections from a 661 nm laser source or white light to obtain 3D images of material surfaces. This microscope performs non-contact imaging with a fully motorized precision stage, achieving resolution down to 1 nm vertically and laterally for laser measurements and 0.01 nm using white light interference. In addition to basic topological measurements such as height profiling and surface roughness, transparent film thickness measurements are possible.

Seamless imaging over large areas is achieved through the precision stage and stitching software. Obtained images can be processed and analyzed through user-friendly software, turned into CAD drawings, and compared with similar images to measure differences between samples. 

Example profile report for a white light interferometry measurement: