The Tencor Profilometer is a metrology tool that generates a line-scan topographical profile of the surface of a sample. This is done by a stylus, which touches the surface of a sample and runs across a prescribed length (up to 5 mm). In some cases it is possible to export the line-scan data as an ASCII file.  Vertical resolution is 1 Å with a 13 µm range or 25 Å with a 300 µm range.