Bard Hall SB58C

The Zeiss Sigma 500 Scanning Electron Microscope (SEM) takes the best capabilities of the Keck SEM and enhances them. It is primarily designed to provide high resolution imaging at low and ultra-low accelerating voltages (3keV down to 200eV) using the in-lens secondary electron detector. In this voltage regime contrast from the sample surfaces is optimized. Other imaging detectors include a scintillating backscatter detector and standard Everhart-Thornley secondary electron detector.

In addition to electron imaging, the Sigma is equipped with an electron backscatter diffraction detector (EBSD) and X-ray spectrometer for energy-dispersive-X-ray-spectroscopy (EDS).  A load-lock enables samples to be quickly loaded and unloaded. For further questions please contact Philip Carubia (pmc228@cornell.edu or 607-255-6757).

To request training on this instrument, complete this form.

Sigma SEM Manual