HomeFacilitiesInstrumentsUser InstrumentsThin Film Deposition and Material ProcessingVarian Thermal Bell Jar Evaporator

Varian Thermal Bell Jar Evaporator

20130322141440_varian.jpg-thumbClark D21

This system is a cryo-pumped thermal evaporator with base pressures in the 10-6 Torr range. Typical source materials are melted by resistive heating in up to three metal evaporation boats or ceramic crucibles. Evaporation rates are manually controlled by varying the output power of a DC power supply, allowing for currents up to 200 amps. Deposition rates are monitored with a quartz crystal microbalance. A variety of sample sizes can be accommodated at varying source to substrate distances. Feed-throughs for electrical inputs (for heating) and temperature measurements.

For rates information, please see the rates page.
Primary Contact

Steve Kriske
Clark Hall, Room D-21

Secondary Contact

Jonathan Shu
Clark Hall, Room 633
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