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X-ray photoelectron spectroscopy XPS

20081021162142_XPS.jpg-thumbClark D21B

UHV system for X-ray photoelectron spectroscopy (XPS), also known as electron spectroscopy for chemical analysis (ESCA). Quantitative elemental analysis as well as chemical bonding information are possible on a variety of samples (films, polymers, ceramics, powders, etc.). Ion sputtering for depth profiling or contaminant removal; in-situ sample tilting. Remote access is available for real-time observation and control of the instrument.


For rates information, please see the rates page.
Primary Contact

Jonathan Shu
Clark Hall, Room 633
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